Simulating Inelastic Scattering in Scanning Transmission Electron Microscopy using μSTEM

Inelastic electron scattering observation using energy filtered transmission electron microscopy for silicon -- germanium nanostructures imaging.

This paper presents a new technique using energy filtered TEM (EFTEM) for inelastic electron scattering contrast imaging of Germanium distribution in Si-SiGe nanostructures. Comparing electron energy loss spectra (EELS) obtained in both SiGe and Si single crystals, we found a spectrum area strongly sensitive to the presence of Ge in the range [50-100 eV]. In this energy loss window, EELS spectr...

15. Scanning Transmission Electron Microscopy

Electron scattering in scanning probe microscopy experiments

It has been shown that electron transitions, as measured in a scanning tunnelling microscope, are related to chemical interactions in a tunnelling barrier. Here, we show that the shape and apparent height of subatomic features in both, measurements of the attractive forces in an atomic force microscope, and measurements of the tunneling current between the Si(111) surface and an oscillating can...

Elemental mapping in scanning transmission electron microscopy

We discuss atomic resolution chemical mapping in scanning transmission electron microscopy (STEM) based on core-loss electron energy loss spectroscopy (EELS) and also on energy dispersive X-ray (EDX) imaging. Chemical mapping using EELS can yield counterintuitive results which, however, can be understood using first principles calculations. Experimental chemical maps based on EDX bear out the t...

Accurate virus quantitation using a Scanning Transmission Electron Microscopy (STEM) detector in a scanning electron microscope.

A method for accurate quantitation of virus particles has long been sought, but a perfect method still eludes the scientific community. Electron Microscopy (EM) quantitation is a valuable technique because it provides direct morphology information and counts of all viral particles, whether or not they are infectious. In the past, EM negative stain quantitation methods have been cited as inaccur...